| 摘要 |
<P>PROBLEM TO BE SOLVED: To overcome the problem that a conventional thermal history sensor can not accurately measure a dimension due to its warpage under the burning condition and there is a disadvantage to detect a thermal history of a burned object. <P>SOLUTION: The thermal history sensor 10 is integrally formed with: a plate body 11 comprising an unburned molded object containing ceramic powder and glass powder, and disposed parallel to a placement plane; a support 12 for abutting on the placement plane in an area smaller than a lower face of the body 11, and supporting the body 11; and a bump 13 having a cross section gradually decreased from an upper face of the body 11 to a top. Since the thermal history sensor 10 is entirely and uniformly shrunk by suppressing the quantity of heat conduction from a shelf plate to the body 11 through the support 12 and receiving more convection heat within a baking furnace and more radiation heat from a heat generating body through the bump 13, a warpage is hardly generated, and a thermal history can be accurately sensed even if the burning condition has the biased convection heat, radiation heat and quantity of the heat conduction. <P>COPYRIGHT: (C)2008,JPO&INPIT |
