| 摘要 |
PROBLEM TO BE SOLVED: To calculate the average fatality of a yield prediction subject product from the type feature quantity of the subject product to precisely predict yield during manufacturing of the yield prediction subject product. SOLUTION: The monthly fatal defect density of a reference product that is different in wiring pattern from, but identical in manufacturing process with the prediction subject product is calculated from measured data. The average fatality of the prediction subject product and of the reference product are calculated from the type feature quantity of the prediction subject product and of the reference product. The monthly fatal defect density of the reference product is multiplied by a calculated average fatality ratio to calculate the monthly fatal defect density of the yield prediction subject product. A yield is calculated using a monthly fatal defect density in the period when a yield prediction subject lot of prediction subject products is processed. COPYRIGHT: (C)2008,JPO&INPIT
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