发明名称 |
METHOD OF MANUFACTURING ORGANIC THIN FILM TRANSISTOR |
摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an organic thin film transistor which has a sufficient carrier mobility and is easily manufactured with less variations. SOLUTION: This method comprises a step of preparing a second member where a first member includes a photothermal conversion layer having a thermal bonding strength to an organic semiconductor layer is smaller than a thermal bonding strength to the first substrate, and an amorphous-state organic semiconductor having a property of being crystallized when heated and melted or sublimated and a second member includes an organic semiconductor layer which connects at least source and drain electrodes provided to a second substrate and which is crystallized and formed when melted or sublimated and which has a bonding strength larger than the bonding strength between the organic semiconductor layer and the photothermal conversion layer; a step of stacking the first and second members; a step of irradiating light to the photothermal conversion layer; a step of separating the first member from the second member. COPYRIGHT: (C)2008,JPO&INPIT
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申请公布号 |
JP2008066439(A) |
申请公布日期 |
2008.03.21 |
申请号 |
JP20060241279 |
申请日期 |
2006.09.06 |
申请人 |
KONICA MINOLTA HOLDINGS INC |
发明人 |
OKADA MASAKAZU;MIYAI MITSUYOSHI |
分类号 |
H01L29/786;H01L21/336;H01L51/05;H01L51/30;H01L51/40 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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