| 摘要 |
PROBLEM TO BE SOLVED: To provide a solid-state imaging apparatus which is quipped with a waveguide structure and more improved in sensitivity behavior. SOLUTION: The solid-state imaging apparatus is equipped with pixels and waveguides 27 which guide incident light to the photoelectric conversion portions 2 of the pixels. The waveguide 27 is composed of a hollow layer 28 serving as a clad portion between a support member 31 formed above a light shading layer 18 around the light receiving region 20 of the pixel and a first layer 29 that is formed above the light receiving region 20 and has a desired refractive index, and the first layer 29 serving as a core portion. COPYRIGHT: (C)2008,JPO&INPIT
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