| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning transmission electron microscope for improving resolution of an electron beam diffraction image. SOLUTION: An electron beam passing hole on a sample holder 30 mounted on a sample stage 9 is formed of a hole 31 in a direction along an electron beam optical axis O and a hole 33 connecting to that hole and in a vertical direction to a direction of that hole. A diffusion angle restriction diaphragm 11 is inserted in a boundary part between the hole 31 and the hole 33, a scintillator 13 is provided in the hole 33 by inclining with respect to the electron beam optical axis O, and a photoelectron multiplier 14 is provided on an outlet part of the hole 33. COPYRIGHT: (C)2008,JPO&INPIT
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