| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a metal film giving superior physical properties when being compared with conventional metal thin films. <P>SOLUTION: The metal film is any of Ta film, W film, Cr film and Mo film formed on a substrate comprising any of silicon, silicon oxide, beryllium oxide and aluminum oxide, has a cubic system crystal structure, and has a crystal orientation showing periodic regularity over the range of 10μm or more in the in-plane direction. The crystal orientation is gradually rotated taking a specified crystal axis as a rotary axis in such a manner that each of ä100} plane, ä110} plane and ä111} plane appears. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
