摘要 |
PROBLEM TO BE SOLVED: To provide a gas barrier film excellent in water vapor barrier properties and simultaneously having high transparency. SOLUTION: In the gas barrier film in which a silicon oxide (SiO<SB>X</SB>) film containing carbon is laminated at least one face of a polymer film substrate, a gas barrier film in which X in the SiO<SB>X</SB>film is 1.7-2.1, the concentration of the carbon element in the SiO<SB>X</SB>film is≤10%, and the concentration of the carbon element decreases toward the surface side of the SiO<SB>X</SB>film from the polymer film substrate side, is used. COPYRIGHT: (C)2008,JPO&INPIT
|