AUTOMATIC TRANSFERRING DEVICE FOR SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

An automatic transfer device for a semiconductor manufacturing apparatus is provided to stop driving of a vehicle when an obstacle is sensed while the vehicle is driving along a track. An automatic transfer device for a semiconductor manufacturing apparatus comprises a track(10), a vehicle(20), a main sensor, an obstacle sensor(40), and a sensor controller(50). The track installed on a ceiling makes a closed circuit by connecting a curved section and a linear section. The vehicle driving along the track moves a clamped wafer carrier to be loaded/unloaded into/from a process facility. The main sensor senses a frontal vehicle from one side of a driving direction of the vehicle. The obstacle sensor, which is a laser sensor, is secured onto the ceiling by a fixing member and senses a directly lower side of the vehicle, while the vehicle is driving along the linear section. The sensor controller comprises a controller(51) discriminating whether an obstacle is sensed or not by a signal sensed by the obstacle sensor, a motor(52) driven by a signal from the controller, and a pad(53) located in a sensing area of the main sensor of the vehicle, which is driving while being rotated by the motor.