| 摘要 |
PROBLEM TO BE SOLVED: To obtain an optical multilayer film which is constituted by alternately laminating a TiO<SB>2</SB>film and a SiO<SB>2</SB>film, in which light scattering is small and transmission loss is small and to obtain its manufacturing method. SOLUTION: In the optical multilayer film constituted by alternately laminating the TiO<SB>2</SB>film and the SiO<SB>2</SB>film, the TiO<SB>2</SB>film is amorphous and the optical multilayer film can be obtained by vacuum deposition in gaseous O<SB>2</SB>containing 4 to 25 mass% of gaseous Ar to form the TiO<SB>2</SB>film. COPYRIGHT: (C)2008,JPO&INPIT
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