摘要 |
PROBLEM TO BE SOLVED: To provide scintillator panel that is more enhanced in the 3stability of metal thin films as reflecting films. SOLUTION: This scintillator panel has a scintillator, formed on a support substrate equipped with the metal reflecting film, and the support substrate has a radiation transmissive substrate, an intermediate film comprising an inorganic film, arranged between the metal reflecting film and the conductive substrate which makes tight contact with both these metal reflecting film and conductive substrate that prevents their contact, and a protective film that is arranged on the metal reflecting filmthat has at least the inorganic film. COPYRIGHT: (C)2008,JPO&INPIT
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