MANUFACTURING METHOD OF THIN FILM TRANSISTOR SUBSTRATE, THIN FILM TRANSISTOR SUBSTRATE, AND LIQUID DISPLAY DEVICE EQUIPPED WITH THE THIN FILM TRANSISTOR SUBSTRATE, AND DETECTION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a thin film transistor substrate which restrains deterioration of manufacturing yield and reliability of a TFT by minimizing the number of masks.

SOLUTION: The method has a first process for forming a first lamination part constituting a gate line 1 and a second lamination part constituting a part of a source line 2 by sequentially forming a first conductive film, a first insulating film, a first semiconductor film, a second semiconductor film and a second conductive film on an insulating substrate and then carrying out patterning, a second process for forming a TFT 5 by exposing a part of the first semiconductor film by patterning each first lamination part, a third process for forming contact holes 16a to 16e by forming a second insulating film to cover each first lamination part and each second lamination part and then carrying out patterning and a fourth process for forming a conductive part 17a constituting the rest of the source line 2 and a picture element electrode 17b by forming a third conductive film to cover the second insulating film and then carrying out patterning.

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