| 摘要 |
PROBLEM TO BE SOLVED: To provide a power supply wiring structure in a semiconductor integrated circuit for assuring signal wirings in the second direction of an intermediate wiring layer without lowering of performance to supply the drive power up to a function circuit. SOLUTION: A power supply wiring D3 of intermediate layer is located within a wiring region of the power supply wiring D4 of the highest layer, extended to an external part of a wiring region of the power supply wiring D1 of the lowest layer in the second direction Y, and via-connected to the power supply wiring D4 of the highest layer. At a crossing region K1 of the power supply wiring D1 of the lowest layer and the power supply wiring D4 of the highest layer, a power supply wiring D2 of the second layer includes a part located at the upper part of the power supply wiring D1 of the lowest layer and a part located at the lower part of the power supply wiring D3 of the intermediate layer, is via-connected to the power supply wiring D1 of the lowest layer and the power supply wiring D3 of the intermediate layer, and a wiring region of the signal wiring R3 that may be wired along the second direction in the intermediate wiring layer is acquired within the crossing region K1. COPYRIGHT: (C)2008,JPO&INPIT
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