发明名称 OPTICAL SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide an optical semiconductor device wherein a window structure having a high top surface is formed easily at the tip of an optical waveguide. SOLUTION: A level difference is formed on the top surface of a substrate 1, an optical waveguide forming region 1B is demarcated on a lower surface, and a window structure, forming a region 1A, is demarcated on a higher surface. An embedding layer 7, with a mesa stripe 8 (including the optical waveguide 3) formed in the optical waveguide forming region 1B, is embedded in is accumulated on the substrate 1. The window structure 5 is configured by constituting the embedding layer 7 as a part thereof. Such a window structure 5 can be formed easily, by accumulating a semiconductor layer of the same thickness on the optical waveguide forming region 1B and the window structure forming region 1A. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008066647(A) 申请公布日期 2008.03.21
申请号 JP20060245619 申请日期 2006.09.11
申请人 FUJITSU LTD 发明人 TAKABAYASHI KAZUMASA
分类号 H01S5/16;H01S5/50 主分类号 H01S5/16
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