摘要 |
PROBLEM TO BE SOLVED: To provide an optical semiconductor device wherein a window structure having a high top surface is formed easily at the tip of an optical waveguide. SOLUTION: A level difference is formed on the top surface of a substrate 1, an optical waveguide forming region 1B is demarcated on a lower surface, and a window structure, forming a region 1A, is demarcated on a higher surface. An embedding layer 7, with a mesa stripe 8 (including the optical waveguide 3) formed in the optical waveguide forming region 1B, is embedded in is accumulated on the substrate 1. The window structure 5 is configured by constituting the embedding layer 7 as a part thereof. Such a window structure 5 can be formed easily, by accumulating a semiconductor layer of the same thickness on the optical waveguide forming region 1B and the window structure forming region 1A. COPYRIGHT: (C)2008,JPO&INPIT
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