| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating apparatus in which the pressure of a treating liquid in a nozzle is exactly measured. SOLUTION: The treating liquid discharged from a pump 4 is sent to a slit nozzle 2 through a filter 5 and an on/off valve 6. A part of the treating liquid supplied to the slit nozzle 2 is applied onto the surface of a substrate to be treated from a discharge port of the lower end of the nozzle and a remaining liquid is recovered through a discharge pipe 8. In such a case, the pressure of the treating liquid in the discharge pipe 8 is measured by a pressure sensor 9. COPYRIGHT: (C)2008,JPO&INPIT
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