| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing, in stable quality, a polymerizable compound for satisfying the requirement of micronization in a lithographic process, especially for improving roughness. SOLUTION: The method for producing the polymerizable compound represented by general formula (3) (R<SP>1</SP>is a 5-20C cyclic saturated hydrocarbon group; R<SP>2</SP>is a hydrogen atom, a methyl group or a CF<SB>3</SB>group) comprises reacting a compound represented by general formula (1) (R<SP>1</SP>is a 5-20C cyclic saturated hydrocarbon group; X is a halogen atom) with an acrylic acid derivative. COPYRIGHT: (C)2008,JPO&INPIT |
