MICRO INERTIAL SENSOR

摘要

An inertial sensor is provided to achieve a high sensitivity and a wide dynamic range by performing an amplification copying a principle and a function of a negative stiffness mechanism and an adaptation mechanism, and to solve a signal processing problem and an inertial effect decreasing problem derived from a minimization of an inertial sensor. An inertial sensor includes a frame(1001). A motion body(1002) moves to one axial direction in the frame. The frame is connected to the motion body by a spring(1003) and a damper(1004). A first motion electrode(1008) and a second motion electrode are mounted at both sides of a moving direction of the motion body to apply an electrostatic force to the motion body when a driving voltage is applied to the first motion electrode and the second motion electrode. A measuring unit calculates inertial from displacement information between the motion body and the frame. A first driving unit(1010) is fixed between the frame and the first motion electrode to adjust a distance between the first motion electrode and the motion body by driving the first motion electrode. A second driving unit is fixed between the frame and the second motion electrode to adjust a distance between the second motion electrode and the motion body by driving the second motion electrode.