摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing device which grows a single crystal having the same crystal orientation as a seed crystal without causing cracks nor melt drips, even when a single crystal of an oxide is manufactured using a raw material melt with especially high fluidity. SOLUTION: Raw material-melting vessel 11, melt-holding vessel 12, seed crystal-holder 13 and drive unit 14 are provided in growth furnace 1. The melt-holding vessel 12 has vertically extending first through-holes 19, upper plate member 16 receiving the melt, intermediate plate member 17 which is arranged in the downstream of the upper plate member 16 and has space structure 20 holding the melt flowed down through the first through-holes 19 in the upper plate member 16 and lower plate member 18 which has second through-holes 22 for continuously feeding the melt held in the space structure 20 to seed crystal 15 located below. COPYRIGHT: (C)2008,JPO&INPIT
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