| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a diamond structure, by which relatively deep grooves, holes and perforations can be formed in diamond with a good precision. SOLUTION: A second layer 58 to fifth layer 64 included in a laminated body 54 are formed from a material having resistance to wet-etching to a first layer 56, and the fifth layer 64 is formed from a material having resistance to each dry-etching when dry etching is applied to each of the second layer 58 to fourth layer 62. COPYRIGHT: (C)2008,JPO&INPIT
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