| 摘要 |
PROBLEM TO BE SOLVED: To provide a film-like object recovery device capable of efficiently recovering film-like objects. SOLUTION: In the film-like object recovery device 1, a first chamber FR for sucking the film-like object FL and a second chamber SR for recovering the film-like object are provided in a housing 2. In the first chamber, a sucking means 4 is connected for generating suction force with respect to the film-like object, and the second chamber is arranged adjacently to the first chamber with a partition plate 21 in between and formed as a closed space. It is provided with a conveyance mechanism 10, 12 spatially connected to the first chamber and the second chamber via a cutout part 21DC provided in the partition plate 21, and carrying out conveyance of the film-like object by carrying out adherence of the film-like object on the basis of the suction force by the sucking means in a first chamber side, moving the film-like object to a second chamber side via the cutout part, and canceling the suction force with respect to the film-like object in the second chamber side. COPYRIGHT: (C)2008,JPO&INPIT
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