| 摘要 |
PROBLEM TO BE SOLVED: To surely suck and hold even a substrate where warpage or twist has occurred while keeping the condition of a substrate surface well, in a substrate carrying device and a substrate inspection system using it. SOLUTION: This substrate carrying device and this substrate inspection system are each provided with: a substrate lifting stage 9 lifting a glass substrate 7; a carrier mechanism 8 arranged movably along the substrate lifting state 9, and having a suction part 16 sucking and holding the glass substrate 7 on the substrate back surface 7b side of any of side edge parts of the glass substrate 7; and a suction assist part 18 having a pressing roller 19 pressing the glass substrate 7 mounted on the suction part 16 from the substrate surface 7a side against the suction part 16, and an actuator 30 moving the pressing roller 19 forward/backward form the side in the carrying direction of the glass substrate 7. COPYRIGHT: (C)2008,JPO&INPIT
|
