发明名称 SEAL ARRANGEMENT WITH CORROSION BARRIER AND METHOD
摘要 A guard barrier arrangement is used in an O-ring seal arrangement to limit reactive species in coming into contact with an O-ring. The arrangement is supported in a chamber passage for exposure to the reactive species. An o-ring is compressed so as to peripherally resiliently bias the guard ring arrangement further into the chamber passage configuration toward the chamber interior to limit access of the reactive species to the o-ring. The passage configuration can use a narrowing surface arrangement against which the barrier arrangement is urged. The barrier can include an annular configuration that can change responsive to being biased into the chamber passage configuration. ® KIPO & WIPO 2008
申请公布号 KR20080025742(A) 申请公布日期 2008.03.21
申请号 KR20087001500 申请日期 2008.01.18
申请人 MATTSON TECHNOLOGY, INC. 发明人 ZUCKER MARTIN;DEVINE DANIEL J.;GEORGE RENE;HOOG JOSEF T.;LEE VINCENT C.
分类号 C23C16/00;H01L21/306 主分类号 C23C16/00
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