PRESSURE REDUCING DEVICE FOR PROCESS CHAMBER

摘要

An apparatus for reducing the pressure of a process chamber is provided to decompress the inside of a process chamber by immediately connecting a nitrogen supply part to an exhaust pipe when the pressure of the process chamber increases rapidly. An intersection valve(100) is installed between the exhaust pipes of a process chamber(500). A pressure control part(400) controls the intersection valve, connecting a nitrogen supply part(300) to the intersection valve. A central pressure control part(600) is connected to the pressure control part, outputting a stop signal for stopping the pressure control part when a process time elapses in the process chamber and operating the pressure control part when a delay time elapses.