| 摘要 |
PROBLEM TO BE SOLVED: To narrow a clearance between the body of a container and a cover during temperature rise of a processing container, when heating the square-piped processing container comprising the body and the cover. SOLUTION: The square-piped processing container 40 comprises the body 41 of a container, and a cover 42 is provided on the body 41 thereof in a detachable manner. A first temperature regulating means 5A is provided on the ceiling of the cover 42, in order to heat the central part of the cover 42 so that its temperature is higher than that of the side wall corner of the processing container 40 or be slightly lower than that thereof for preventing warpage of the cover 42 and the body 41 thereof, in the bonding part during the temperature rising of the processing container 40, and a second temperature regulating means 5B is provided on the side wall 41b of the body 41 thereof. Thus, while the warpage of the cover 42 in the boding part is prevented, the processing container 40 is narrow of clearance by heating between the cover 42 and the body 41 thereof. COPYRIGHT: (C)2008,JPO&INPIT
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