| 摘要 |
PROBLEM TO BE SOLVED: To provide a MEMS switch capable of realizing downsizing, reduction in drive voltage, and high speed of switching operation. SOLUTION: A movable electrode 13 and a fixed electrode 15 are respectively split into two pieces and a level difference is provided between the split fixed electrodes 15a, 15b, and mutually adjoining movable electrodes 13a, 13b are connected through a plate spring 15b. Thereby, when voltage is impressed between the movable electrodes 13a, 13b and the fixed electrodes 15a, 15b, the movable electrodes 13a, 13b and fixed electrodes 15a, 15b opposed to these are contacted in order and switching can be made. As a result, without making the electrode area wide, a large electrostatic attraction can be obtained even with a low drive voltage. Accordingly, compared with the conventional RF-MEMS switch, a RF-MEMS switch capable of realizing further downsizing, reduction in drive voltage, and higher speed of switching operation by a single power source can be provided. COPYRIGHT: (C)2008,JPO&INPIT
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