| 摘要 |
PROBLEM TO BE SOLVED: To simply and easily conduct zero-point adjustment of a valve by finely adjusting an actuator consisting of a stepping motor and a cam mechanism in a vertical direction. SOLUTION: In the cam type valve 1 of a stepping motor driving type, a stem 7 is provided in a vertically movable manner in a body 2 having an inflow passage 2a, an outflow passage 2b, a valve chamber 2c and a valve seat 2d. The stem 7 is lowered by the actuator consisting of a stepping motor 9 provided above the stem 7 and the cam mechanism 10 for converting rotation motion of the stepping motor 9 into a linear motion and transmitting it to the stem 7 and a diaphragm 3 provided in the valve chamber 2c or a valve element 30 provided at a lower end part of the stem 7 is seated to the valve seat 2d. In this case, a lifting and lowering support mechanism 11 for liftably supporting the actuator is provided for a hood 5 covering the valve chamber 2c of the body 2 is provided and a height fine adjustment mechanism 12 for finely adjusting a height position of the actuator for the stem 7 is provided for the lifting and lowering support mechanism 11. COPYRIGHT: (C)2008,JPO&INPIT
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