| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser annealer which can be improved in use efficiency of energy of a laser beam. SOLUTION: The laser annealer includes a laser light source branching optical system for branching a laser beam into a plurality of laser beams, first zoom optical system into which the plurality of branched laser beams are incident, holding table for holding an object to be processed into which a plurality of laser beams output from the first zoom optical system are incident, moving mechanism for moving the holding table in a direction parallel to the surface of the object to be processed, and controller for controlling the moving mechanism, so that the plurality of laser beams may be scanned in a first direction on the surface of the object to be processed. The branching optical system branches the laser beam in such a manner that the cross sections of the plurality of laser beams may be arranged side by side in a second direction which crosses the first direction on the surface of the object to be processed, and the first zoom optical system changes the magnitude of a pattern in which the cross sections of the plurality of laser beams are formed side by side in the second direction on the surface of the object to be processed. COPYRIGHT: (C)2008,JPO&INPIT
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