| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a small sensor unit having high reliability and an easy manufacturing method thereof. <P>SOLUTION: The sensor unit 1 is provided with a sensor 2 and a module 5 having a built-in active element. The sensor 2 consists of an SOI substrate 11; and has a frame member 21, a plurality of through electrodes 27 piercing through the frame member, a plurality of beams 22 projecting from the frame member 21 in an inside direction, a weight 23 supported by the beams, a piezo-resistance element 16 disposed on the beam, and a wiring 18 connected to the piezo-resistance element. The module 5 is joined to the frame member 21 of the sensor 2 so as to form a predetermined gap between itself and the weight 23. The module 5 has a substrate 31 having a built-in active element 45 and a plurality of through electrodes 33 on a region outer than the active element, and a wiring 34 disposed on the substrate so as to be connected to the through electrodes. The wiring 34 is joined to the through electrodes 27 of the sensor 2. <P>COPYRIGHT: (C)2008,JPO&INPIT |
