| 摘要 |
PROBLEM TO BE SOLVED: To provide a mold having a uniform height of concavities and convexities and being capable of easily manufacturing a complicated pattern shape with a small number of steps, and a method for manufacturing the same. SOLUTION: The mold 1 comprises a structure having a convex resist pattern 5 formed on one side surface of a substrate 3. A resist layer 7 is formed on the surface of the substrate 3 by coating a resist by a spin or spray method. Thereafter, a concave and convex shape 2 is obtained on the substrate by drawing a pattern with an electron beam on the resist layer 7, and developing it. The mold 1 is obtained by hardening the resist pattern 5 by silylization. The mold 1 is also obtained by repeating these steps. Thus, the mold having a uniform height of concavities and convexities capable of easily manufacturing a complicated pattern shape with a small number of steps, and the method for manufacturing the same can be provided. COPYRIGHT: (C)2008,JPO&INPIT |
