| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a microstructure. SOLUTION: The method of manufacturing the microstructure includes that: a first structure part is formed on a substrate; a sacrificial material is arranged on the first structure part; a layer of a first structure material is deposited on the sacrificial material and the substrate; and a second structure part is formed on the layer of the first structure material by removing at least a part of the sacrificial material, wherein the second structure part is connected to the substrate and movable between the first position at which the second structure part is separated from the first structure part and the second position at which the second structure part is made contact to the first structure part, the stiction between the second structure part and the first structure part is reduced by forming a carbon layer on at least one of the surfaces of the second structure part and the first structure part. COPYRIGHT: (C)2008,JPO&INPIT
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