| 摘要 |
PROBLEM TO BE SOLVED: To provide a microcontainer for hermetically encapsulating reactive materials. SOLUTION: A microcontainer device for a micro-electro-mechanical system such as an atomic clock is provided. The microcontainer device includes a substrate and a cavity in the substrate defined by a sidewall having an upper edge. The cavity is configured to hold a reactive material such as rubidium or cesium. A lid having a lower surface is configured to sealingly cover the cavity. A first hermetic material is disposed around the outer perimeter of the upper edge of the sidewall, and a second hermetic material is disposed around the perimeter of the lower surface of the lid. A sealing material chemically compatible with the reactive material is disposed around the inner perimeter of the upper edge of the sidewall adjacent to the first hermetic material. COPYRIGHT: (C)2008,JPO&INPIT
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