| 摘要 |
An inching mechanism for a scanning probe microscope capable of performing measurement with high precision while enhancing the scanning speed by a probe furthermore, and a scanning probe microscope comprising it. The inching mechanism for a scanning probe microscope which is provided in a scanning probe microscope (SPM) ( 1 ) having a stage ( 16 ) for mounting a sample S, and a probe ( 20 ) approaching closely to or touching the surface of the sample S, characterized in that the inching mechanism comprises a first drive section and a second drive section provided independently, a probe inching mechanism ( 26 ) having the first drive section and inching, by the first drive section, the probe ( 20 ) in the X direction and Y direction parallel with the surface of the sample S and intersecting each other, and a stage inching mechanism ( 27 ) having the second drive section and inching, by the second drive section, the stage ( 16 ) in the Z direction perpendicular to the surface of the sample S.
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