| 摘要 |
Embodiments relate to a method of manufacturing an image sensor which may include forming a gate pattern including a tunnel oxide film, an oxide-nitride-oxide (ONO) film, a floating gate and a control gate over a semiconductor substrate. An oxide film and a nitride film may be formed over the semiconductor substrate including the gate pattern. A photoresist pattern may be formed which covers the oxide film and the nitride film formed over the gate pattern. The nitride film may be etched in a region not covered by the photoresist pattern. The oxide film may be etched to have a predetermined thickness. A deep implant process may deeply implant an N-type dopant into the semiconductor substrate. Ashing and cleaning processes may remove the remaining photoresist pattern.
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