发明名称 STRAINED-CHANNEL FIN FIELD EFFECT TRANSISTOR (FET) WITH A UNIFORM CHANNEL THICKNESS AND SEPARATE GATES
摘要 A semiconductor device (and method for making the same) includes a strained-silicon channel formed adjacent a source and a drain, a first gate formed over a first side of the channel, a second gate formed over a second side of the channel, a first gate dielectric formed between the first gate and the strained-silicon channel, and a second gate dielectric formed between the second gate and the strained-silicon channel. The strained-silicon channel is non-planar.
申请公布号 US2008064149(A1) 申请公布日期 2008.03.13
申请号 US20070927893 申请日期 2007.10.30
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 COHEN GUY M.
分类号 H01L21/84;H01L27/08;H01L21/336;H01L21/8234;H01L27/088;H01L27/092;H01L27/12;H01L29/10;H01L29/786 主分类号 H01L21/84
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