| 摘要 |
An apparatus for manufacturing a flat panel display device and a controlling method thereof are provided to control operation of a pump for liquid chemical leakage through software or hardware when a liquid chemical leaks by connecting leak sensors with a magnetic contactor. An apparatus for manufacturing a flat panel display device comprises a processing chamber(10), a liquid chemical tank(20), a pump(30), multiple pipes(41,42,43), multiple connectors(51,52,53), leak sensors(61,62,63,64), and a relay. The pipes are installed between the liquid chemical tank and the pump to provide liquid chemical passages. The relay opens and closes contacts thereof according to signals from the leak sensors to control operation of the pump. A magnetic contactor is connected with the relay and the pump to control the operation of the pump. |
