| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric element superior in adhesion of a lower electrode film with a board and with a piezoelectric layer in displacement characteristic and long reliability, its manufacturing method, and a liquid jetting head. <P>SOLUTION: The element is composed of a lower electrode film provided on side of a board, a piezoelectric material-made layer provided on the lower electrode film, and an upper electrode film provided on the piezoelectric layer. The lower electrode film contains platinum, titanium, iridium, and oxygen; and consists of a first layer 65 mainly containing platinum on the board 10, a second layer 66 mainly containing titanium on the first layer 65, and a third layer 67 mainly containing iridium on the second layer 66. <P>COPYRIGHT: (C)2008,JPO&INPIT |
