| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate-processing apparatus capable of realizing low cost, small footprint and small faceprint, as well as, stable processes and high throughput. <P>SOLUTION: A substrate transfer apparatus, for loading and unloading substrates in a reaction chamber, includes an arm having a far end capable of laterally moving in linear direction; and end-effectors for loading and unloading substrates in a reaction chamber, which include a lower-side end-effector and an upper-side end-effector. Either of the lower end-effector or the upper end-effector is coupled movably to the arm at the far end of the arm, and the other end-effector is fixed to the movably coupled end-effector. The end-effector that has been fixed is fixed to the movably coupled end-effector. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
