| 摘要 |
PROBLEM TO BE SOLVED: To provide a foreign matter detector which is downsized and has high detection accuracy. SOLUTION: The foreign matter detector S comprises: a light projection unit 30 emitting a laser light; a light receiving camera Ca having a light receiving part 70 in which image sensors are arranged in a matrix form; and a controller 80. The light projection unit 30 contains two laser light sources 43 and 45, wherein one of them has its optical axis L2 tilted downward in expectation of the phenomenon in which an emitted laser light is refracted by the influence of room temperature. This configuration allows to detect a foreign matter adhering near a far point of a glass substrate W with no difficulty since the laser light is applied near the far point of the glass substrate W which is in a far side from the light projecting side even if the laser light is refracted by the influence of room temperature. COPYRIGHT: (C)2008,JPO&INPIT
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