发明名称 COMPENSATION OF EFFECTS OF ATMOSPHERIC PERTURBATIONS IN OPTICAL METROLOGY
摘要 In general, in a first aspect, the invention features a method that includes using an interferometry assembly to provide three different output beams, each output beam including an interferometric phase related to an optical path difference between a corresponding first beam and a corresponding second beam, each first beam contacting a measurement object at least once, monitoring the interferometric phases for each of the three different output beams, and deriving information about variations in the optical properties of a gas in the first beam paths from the three monitored phases.
申请公布号 US2008062405(A1) 申请公布日期 2008.03.13
申请号 US20070876577 申请日期 2007.10.22
申请人 ZYGO CORPORATION 发明人 HILL HENRY A.
分类号 G01N21/00 主分类号 G01N21/00
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