| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a salt to become an acid generator for providing a chemically amplified resist composition exhibiting high resolution and high sensitivity. <P>SOLUTION: The salt, for example, is represented by formula (Ia) (P<SP>1</SP>-P<SP>3</SP>are each a 1-30C alkyl group or a 3-30C cyclic hydrocarbon group; the phenyl groups each directly bonded to a sulfur atom are two or less; P<SP>1</SP>-P<SP>3</SP>each may contain a hydroxy group, an alkyl group, an alkoxy group or a cyclic hydrocarbon group as a substituent group; Q<SP>1</SP>and Q<SP>2</SP>are each a fluorine atom or a 1-6C perfluoroalkyl group; A is -OH or -Y<SP>1</SP>-OH; Y<SP>1</SP>is a 1-6C straight-chain or branched-chain alkylene group; ring X<SP>1</SP>is a 3-30C cyclic hydrocarbon group; ring X<SP>2</SP>is a 3-30C cyclic hydrocarbon group; ring X<SP>3</SP>is a 6-30C tricyclic or polycyclic hydrocarbon group; n is an integer of 1-9; m is an integer of 0-12; n is an integer of 1-12). <P>COPYRIGHT: (C)2008,JPO&INPIT |
