发明名称 INERTIAL SENSOR AND MANUFACTURING METHOD OF INERTIAL SENSOR
摘要 <P>PROBLEM TO BE SOLVED: To provide an inertial sensor which acquires a stable characteristic as a sensor, and sets a detection shaft at a prescribed angle. <P>SOLUTION: The inertial sensor is equipped with: a sensor body 10 having a crystal oscillation element 11 which is a detection element for detecting the magnitude of a physical quantity in the detection shaft direction, a ceramic package 17 for storing the crystal oscillation element 11, a mounting electrode 18 formed on the outside bottom surface of the ceramic package 17, and a metal ball 2 connected to the mounting electrode 18, for tilting the detection shaft at a prescribed angle from the normal direction to be detected; a lead frame 4 connected to the mounting electrode 18 including the metal ball 2; and a resin 5 for molding the sensor body 10. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008058145(A) 申请公布日期 2008.03.13
申请号 JP20060235132 申请日期 2006.08.31
申请人 EPSON TOYOCOM CORP 发明人 SATO KENJI;MATSUNAGA MASATAKA
分类号 G01C19/56;G01C21/00;G01P9/04 主分类号 G01C19/56
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