FLAW INSPECTION METHOD AND FLAW INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To accurately set a Cell Area while automating the setting of the Cell Area set by the Recipe of a flaw inspection device. SOLUTION: The discrimination of a Cell Mat Area set heretofore by clicking a mouse by a person is performed by scanning an Image using the difference between the distribution features of a Gray Levels of the Cell Mat Area and a non-Cell Mat Area to divide the Cell Mat Area and the non-Cell Mat Area from the scanning result. Concretely, the threshold value becoming a standard for discriminating the start and finish points of a Cell Mat is calculated based on an Area where only a Memory Cell is present and the start and finish points are subsequently searched by adapting the threshold value and connected respectively to for a Cell Area. COPYRIGHT: (C)2008,JPO&INPIT