| 摘要 |
An electrostatic chuck including lower and upper regions of a ceramic base, an embedded electrode and a resin film formed on the surface of the base. Volume resistivity of the upper region is 1x10<SUP>9 </SUP>Omega.cm to 1x10<SUP>12 </SUP>Omega.cm, surface roughness of the surface of the upper region is 0.4 mum or less in centerline average roughness Ra, and the resin film is made of denatured fluorine resin. A thickness of the resin film is 1 mum or more, variations of the thickness of the resin film are ±30% or less, static friction and dynamic friction coefficients of a surface of the resin film is 0.2 or less, hardness of the resin film is 3H to F in a pencil method, and a contact angle of the resin film with water is 85° or more.
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