发明名称 POLISHING PAD
摘要 <p>Disclosed is a polishing pad having excellent durability. The polishing pad has a substrate layer and a polishing layer provided on the substrate layer, wherein the polishing layer comprises a thermocurable polyurethane foam having therein approximately spherical interconnected cells with an average cell diameter of 35 to 300 µm.</p>
申请公布号 WO2008029538(A1) 申请公布日期 2008.03.13
申请号 WO2007JP58758 申请日期 2007.04.23
申请人 TOYO TIRE & RUBBER CO., LTD.;FUKUDA, TAKESHI;MARUYAMA, SATOSHI;HIROSE, JUNJI;NAKAMURA, KENJI;DOURA, MASATO 发明人 FUKUDA, TAKESHI;MARUYAMA, SATOSHI;HIROSE, JUNJI;NAKAMURA, KENJI;DOURA, MASATO
分类号 B24B37/22;B24B37/24;H01L21/304 主分类号 B24B37/22
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