| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a piezoelectric actuator acquiring excellent vibration action to a shim even when using a piezoelectric thin plate having a warpage before being bonded on the shim. <P>SOLUTION: In the manufacturing method of the piezoelectric actuator using a piezoelectric thin plate having a warpage before being bonded on the shim, a flat circular baked body is first formed of a piezoelectric powdery material, film-like electrodes are formed on the front and rear surfaces of the baked body, and then, polarization processing is applied to front and rear directions to form a large number of circular piezoelectric thin plates. Subsequently, the circular piezoelectric thin plates are classified based on the quantity of warpage of a center portion for a circumferential portion, and a pair of plates having the same warpage quantity is selected. Then, the selected pair of bowl-like circular piezoelectric thin plates are each compression-bonded on the front and rear of the shim made of a flat circular conductive metal thin film in a direction in which they are warped convexly so that the center of each of the circular piezoelectric thin plates are farther from the shim rather than the circumferential edge portion. <P>COPYRIGHT: (C)2008,JPO&INPIT |
