| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable to discriminate whether or not treatment has been normally completed in a work treatment device to treat a work by plasma irradiation such as reforming or the like of a substrate. <P>SOLUTION: A wireless tag 81 is mounted on a non-utilizing portion W2 at the peripheral part of a work W and whether or not treatment is normally completed is written on the wireless tag 81 by a reader/writer through an antenna 82. Thereby, even in the case, as a plasma treatment, a treatment of which completion can not be almost visually discriminated such as, for example, a surface reforming treatment of glass substrate is applied, it can be discriminated whether or not the work is normally completed in treatment, by passing the work W in the reader/writer and reading the information in the wireless tag 81. By this, control of a work-in-process in the work treatment device S at the time of stop of a continuously flowing production line or a defective product can be made easily, and wasteful work such as applying a further treatment on the defective product at a subsequent process can be saved. <P>COPYRIGHT: (C)2008,JPO&INPIT |
