| 摘要 |
A MEMS module package includes a substrate, a silicon chip attached on the substrate and having an active zone and an inactive zone surrounding around the active zone, a plurality of bonding wires electrically connected the silicon chip and the substrate, and an encapsulant formed between the inactive zone of the silicon chip and the substrate to encapsulate the inactive zone of the silicon, the bonding wires and a part of the substrate in such a manner that the active zone of the silicon chip is exposed outside the encapsulant. The MEMS module package uses a molding technique to substitute for the conventional cap package, thereby simplifying the packaging procedure and saving much the cost of manufacturing. |
