| 摘要 |
PROBLEM TO BE SOLVED: To provide a static pressure gas bearing device capable of increasing bearing rigidity and load capacity, without degrading radial bearing performance and thrust bearing performance of a static pressure gas bearing. SOLUTION: A third exhaust annular groove 17 is arranged on an outer peripheral surface of a rotary shaft 1 near a thrust bearing surface of a first static pressure gas bearing 3. A fourth exhaust annular groove 18 is arranged on the outer peripheral surface of the rotary shaft 1 near a thrust bearing surface of a second static pressure gas bearing 5. COPYRIGHT: (C)2008,JPO&INPIT
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