| 发明名称 |
Apparatus for Blanking a Charged Particle Beam |
| 摘要 |
A beam blanking unit ( 1 ) comprises first and second blanking plates ( 2, 3 ) mounted to a support plate ( 15 ). A stopper ( 4 ) is mechanically and electrically connected to the first blanking plate ( 2 ).
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| 申请公布号 |
US2008061246(A1) |
申请公布日期 |
2008.03.13 |
| 申请号 |
US20050628196 |
申请日期 |
2005.05.13 |
| 申请人 |
ZHANG TAO |
发明人 |
ZHANG TAO |
| 分类号 |
H01J3/26;G03F7/00;G21K1/087;H01J9/14;H01J37/04;H01J37/09;H01J37/147;H01J37/15 |
主分类号 |
H01J3/26 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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