首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
REMA-Objektiv für Mikrolithographie-Projektionsbelichtungsanlagen
摘要
申请公布号
DE59611458(D1)
申请公布日期
2008.03.13
申请号
DE19965011458
申请日期
1996.11.09
申请人
CARL ZEISS SMT AG
发明人
FUERTER, GERD;WANGLER, JOHANNES;DINGER, UDO;ITTNER, GERHARD
分类号
G03F7/20;G02B13/14;G02B13/24;H01L21/027
主分类号
G03F7/20
代理机构
代理人
主权项
地址
您可能感兴趣的专利
Multiple Port Discharge Manifold Fluid End
VACUUM DEVICE FOR PLANTS FOR THE PROCESSING OF CONTAINERS, AND METHOD FOR CONTROLLING A VACUUM DEVICE
CLEARANCE MEASURING SENSOR WITH ABRADABLE ELECTRODE
AIRFOIL GEOMETRY OF BLADE FOR AXIAL COMPRESSOR
CENTRIFUGAL COMPRESSOR HAVING COOLING SYSTEM
CENTRIFUGAL COMPRESSOR HAVING SEAL SYSTEM
ASSEMBLY FOR A FLUID FLOW MACHINE
DAMPERS FOR FAN SPINNERS OF AIRCRAFT ENGINES
Enclosed Vertical Axis Fluid Rotor
AIR COMPRESSOR BACKING PLATE
ROD LOADER ATTACHMENT
UNDERDRAIN ASSEMBLY AND METHOD OF MANUFACTURING THE SAME
FUNCTIONAL ROAD STRUCTURE AND CONSTRUCTION METHOD THEREOF
VITREOUS OR AT LEAST PARTIALLY CRYSTALLINE JOINING MATERIAL AND USES OF SAME
FIXING DEVICE AND IMAGE FORMING APPARATUS
OPTICAL SIGNAL TRANSMISSION DEVICE APPLYING ALTERNATIVE AND SELECTABLE TRANSMISSION PATHS
Wavelength Division Multiplexing Passive Optical Network System
OPTICAL TRANSMISSION SYSTEM, OPTICAL TRANSMISSION APPARATUS, AND OPTICAL TRANSMISSION METHOD
OPTICAL TRANSMISSION DEVICE, OPTICAL TRANSMISSION SYSTEM, AND OPTICAL TRANSMISSION METHOD
Convection Wall Heater with Power Cord Plug