| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a through-hole machining method, which can simply machine a taperless through-hole using a simple optical member by a laser beam, a through-hole machining system, and a mask for use in the method. <P>SOLUTION: In this method, a through-hole is formed in a workpiece by a pulse laser beam. A workpiece 7 is irradiated with a laser beam through a mask 11 such that the profile of laser fluence of a pulse laser beam 5 shows a Gaussian distribution and the laser fluence of 1/(e<SP>1/2</SP>) of the maximum fluence in the Gaussian distribution is less than the abrasion threshold value of the workpiece. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
